Humidity sensor based on Gallium Nitride for real time monitoring applications

Abstract Gallium Nitride (GaN) remarkably shows high electron mobility, wide energy band gap, biocompatibility, and chemical stability. Wurtzite structure makes topmost Gallium atoms electropositive, hence high ligand binding ability especially to anions, making it usable as humidity sensor due to w...

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Autores principales:	Chaudhry Muhammad Furqan, Muhammad Umair Khan, Muhammad Awais, Fulong Jiang, Jinho Bae, Arshad Hassan, Hoi-Sing Kwok
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/3a822eb974634b5f871de4a7c3039c32
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spelling	oai:doaj.org-article:3a822eb974634b5f871de4a7c3039c322021-12-02T15:00:55ZHumidity sensor based on Gallium Nitride for real time monitoring applications10.1038/s41598-021-89956-02045-2322https://doaj.org/article/3a822eb974634b5f871de4a7c3039c322021-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-89956-0https://doaj.org/toc/2045-2322Abstract Gallium Nitride (GaN) remarkably shows high electron mobility, wide energy band gap, biocompatibility, and chemical stability. Wurtzite structure makes topmost Gallium atoms electropositive, hence high ligand binding ability especially to anions, making it usable as humidity sensor due to water self-ionization phenomenon. In this work, thin-film GaN based humidity sensor is fabricated through pulse modulated DC magnetron sputtering. Interdigitated electrodes (IDEs) with 100 μm width and spacing were inkjet printed on top of GaN sensing layer to further enhance sensor sensitivity. Impedance, capacitance, and current response were recorded for humidity and bio-sensing applications. The sensor shows approximate linear impedance response between 0 and 100% humidity range, the sensitivity of 8.53 nF/RH% and 79 kΩ/RH% for capacitance and impedance, and fast response (Tres) and recovery (Trec) time of 3.5 s and 9 s, respectively. The sensor shows little hysteresis of < 3.53% with stable and wide variations for accurate measurements. Especially, it demonstrates temperature invariance for thermal stability. Experimental results demonstrate fabricated sensor effectively evaluates plant transpiration cycle through water level monitoring by direct attachment onto leaves without causing any damage as well as freshness level of meat loaf. These properties of the proposed sensor make it a suitable candidate for future electronics providing a low-cost platform for real time monitoring applications.Chaudhry Muhammad FurqanMuhammad Umair KhanMuhammad AwaisFulong JiangJinho BaeArshad HassanHoi-Sing KwokNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-14 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Chaudhry Muhammad Furqan Muhammad Umair Khan Muhammad Awais Fulong Jiang Jinho Bae Arshad Hassan Hoi-Sing Kwok Humidity sensor based on Gallium Nitride for real time monitoring applications
description	Abstract Gallium Nitride (GaN) remarkably shows high electron mobility, wide energy band gap, biocompatibility, and chemical stability. Wurtzite structure makes topmost Gallium atoms electropositive, hence high ligand binding ability especially to anions, making it usable as humidity sensor due to water self-ionization phenomenon. In this work, thin-film GaN based humidity sensor is fabricated through pulse modulated DC magnetron sputtering. Interdigitated electrodes (IDEs) with 100 μm width and spacing were inkjet printed on top of GaN sensing layer to further enhance sensor sensitivity. Impedance, capacitance, and current response were recorded for humidity and bio-sensing applications. The sensor shows approximate linear impedance response between 0 and 100% humidity range, the sensitivity of 8.53 nF/RH% and 79 kΩ/RH% for capacitance and impedance, and fast response (Tres) and recovery (Trec) time of 3.5 s and 9 s, respectively. The sensor shows little hysteresis of < 3.53% with stable and wide variations for accurate measurements. Especially, it demonstrates temperature invariance for thermal stability. Experimental results demonstrate fabricated sensor effectively evaluates plant transpiration cycle through water level monitoring by direct attachment onto leaves without causing any damage as well as freshness level of meat loaf. These properties of the proposed sensor make it a suitable candidate for future electronics providing a low-cost platform for real time monitoring applications.
format	article
author	Chaudhry Muhammad Furqan Muhammad Umair Khan Muhammad Awais Fulong Jiang Jinho Bae Arshad Hassan Hoi-Sing Kwok
author_facet	Chaudhry Muhammad Furqan Muhammad Umair Khan Muhammad Awais Fulong Jiang Jinho Bae Arshad Hassan Hoi-Sing Kwok
author_sort	Chaudhry Muhammad Furqan
title	Humidity sensor based on Gallium Nitride for real time monitoring applications
title_short	Humidity sensor based on Gallium Nitride for real time monitoring applications
title_full	Humidity sensor based on Gallium Nitride for real time monitoring applications
title_fullStr	Humidity sensor based on Gallium Nitride for real time monitoring applications
title_full_unstemmed	Humidity sensor based on Gallium Nitride for real time monitoring applications
title_sort	humidity sensor based on gallium nitride for real time monitoring applications
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/3a822eb974634b5f871de4a7c3039c32
work_keys_str_mv	AT chaudhrymuhammadfurqan humiditysensorbasedongalliumnitrideforrealtimemonitoringapplications AT muhammadumairkhan humiditysensorbasedongalliumnitrideforrealtimemonitoringapplications AT muhammadawais humiditysensorbasedongalliumnitrideforrealtimemonitoringapplications AT fulongjiang humiditysensorbasedongalliumnitrideforrealtimemonitoringapplications AT jinhobae humiditysensorbasedongalliumnitrideforrealtimemonitoringapplications AT arshadhassan humiditysensorbasedongalliumnitrideforrealtimemonitoringapplications AT hoisingkwok humiditysensorbasedongalliumnitrideforrealtimemonitoringapplications
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Humidity sensor based on Gallium Nitride for real time monitoring applications

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