High-Performance Amorphous Zinc–Tin–Oxide Thin-Film Transistors With Low Tin Concentration

In this paper, we present thin-film transistors (TFTs) with a zinc–tin–oxide (ZTO) layer achieved through magnetron co-sputtering. Amorphous ZTO TFTs with an Sn concentration of 2.49%, 6.95%, 7.11%, 11.95%, and 16.47% were...

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Autores principales: Shufeng Weng, Rongsheng Chen, Wei Zhong, Sunbin Deng, Guijun Li, Fion Sze Yan Yeung, Linfeng Lan, Zhijian Chen, Hoi-Sing Kwok
Formato: article
Lenguaje:EN
Publicado: IEEE 2019
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Acceso en línea:https://doaj.org/article/400d9b0a92f84515ba85634b3e5980ef
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Sumario:In this paper, we present thin-film transistors (TFTs) with a zinc&#x2013;tin&#x2013;oxide (ZTO) layer achieved through magnetron co-sputtering. Amorphous ZTO TFTs with an Sn concentration of 2.49&#x0025;, 6.95&#x0025;, 7.11&#x0025;, 11.95&#x0025;, and 16.47&#x0025; were fabricated, to investigate the effect of low-doped Sn. With a doping of 2.49&#x0025; Sn, the electrical characteristics of TFTs can be obviously improved. After annealing at 440 &#x00B0;C, the optimal TFTs displayed a field-effect mobility of 8.71 cm<sup>2</sup>/<inline-formula> <tex-math notation="LaTeX">$\text{V}\cdot \text{s}$ </tex-math></inline-formula>, a high <inline-formula> <tex-math notation="LaTeX">$\text{I}_{\mathrm{ on/off}}$ </tex-math></inline-formula> ratio of over <inline-formula> <tex-math notation="LaTeX">$10^{8}$ </tex-math></inline-formula>, a subthreshold swing of 0.17 V/decade, and a turn-on voltage of &#x2212;0.4 V, even with an Sn concentration of only 11.95&#x0025;. Meanwhile, the shift of turn-on voltage under negative gate bias stress was only &#x2212;0.4 V.