Abnormal Positive Bias Temperature Instability Induced by Dipole Doped N-Type MOSCAP
This work performs fundamental electrical measurements and a positive bias temperature instability (PBTI) test on an N-type metal oxide semiconductor capacitor (MOSCAP) and a La<sub>2</sub>O<sub>3</sub> dipole-doped N-type MOSCAP. Experimental results show that the dipole-dop...
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| Main Authors: | , , , , , , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
IEEE
2019
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| Subjects: | |
| Online Access: | https://doaj.org/article/4047e49c404149afa37bbd7316f0ca15 |
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