Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate

Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate

Focused Ion Beam-Induced Deposition (FIBID) is a single-step nanopatterning technique that applies a focused beam of ions to induce the decomposition of a gaseous precursor. The processing rate of FIBID increases by two orders of magnitude when the process is performed at cryogenic temperatures (Cry...

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Detalles Bibliográficos
Autores principales: Pablo Orús, Fabian Sigloch, Soraya Sangiao, José María De Teresa
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
focused ion beam
nanofabrication
direct-write growth
tungsten–carbon nanostructures
cryogenic nanolithography
Technology
T
Engineering (General). Civil engineering (General)
TA1-2040
Biology (General)
QH301-705.5
Physics
QC1-999
Chemistry
QD1-999
Acceso en línea:https://doaj.org/article/4062fad0b82f4e458816500582e8a566
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https://doaj.org/article/4062fad0b82f4e458816500582e8a566

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