Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate

Focused Ion Beam-Induced Deposition (FIBID) is a single-step nanopatterning technique that applies a focused beam of ions to induce the decomposition of a gaseous precursor. The processing rate of FIBID increases by two orders of magnitude when the process is performed at cryogenic temperatures (Cry...

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Autores principales:	Pablo Orús, Fabian Sigloch, Soraya Sangiao, José María De Teresa
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	focused ion beam nanofabrication direct-write growth tungsten–carbon nanostructures cryogenic nanolithography Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/4062fad0b82f4e458816500582e8a566
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spelling	oai:doaj.org-article:4062fad0b82f4e458816500582e8a5662021-11-11T15:11:04ZCryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate10.3390/app1121101232076-3417https://doaj.org/article/4062fad0b82f4e458816500582e8a5662021-10-01T00:00:00Zhttps://www.mdpi.com/2076-3417/11/21/10123https://doaj.org/toc/2076-3417Focused Ion Beam-Induced Deposition (FIBID) is a single-step nanopatterning technique that applies a focused beam of ions to induce the decomposition of a gaseous precursor. The processing rate of FIBID increases by two orders of magnitude when the process is performed at cryogenic temperatures (Cryo-FIBID): the precursor forms a condensed layer on the surface of the cooled substrate, greatly enhancing the amount of material available for decomposition. Cryo-FIBID has been achieved so far by making use of liquid nitrogen-based cooling circuits, which require the passage of a flowing gas as a cooling agent. Here, the Cryo-FIBID of the W(CO)<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mn>6</mn></msub></semantics></math></inline-formula> precursor is performed using a coolant-free thermoelectric plate utilizing the Peltier effect. Performed at −60 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mrow></mrow><mo>∘</mo></msup></semantics></math></inline-formula>C, the procedure yields a W–C-based material with structural and electrical properties comparable to those of its counterpart grown in coolant-based Cryo-FIBID. The use of the thermoelectric plate significantly reduces the vibrations and sample drift induced by the flow of passing coolant gas and allows for the fabrication of similar nanostructures. In summary, the reported process represents a further step towards the practical implementation of the Cryo-FIBID technique, and it will facilitate its use by a broader research community.Pablo OrúsFabian SiglochSoraya SangiaoJosé María De TeresaMDPI AGarticlefocused ion beamnanofabricationdirect-write growthtungsten–carbon nanostructurescryogenic nanolithographyTechnologyTEngineering (General). Civil engineering (General)TA1-2040Biology (General)QH301-705.5PhysicsQC1-999ChemistryQD1-999ENApplied Sciences, Vol 11, Iss 10123, p 10123 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	focused ion beam nanofabrication direct-write growth tungsten–carbon nanostructures cryogenic nanolithography Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999
spellingShingle	focused ion beam nanofabrication direct-write growth tungsten–carbon nanostructures cryogenic nanolithography Technology T Engineering (General). Civil engineering (General) TA1-2040 Biology (General) QH301-705.5 Physics QC1-999 Chemistry QD1-999 Pablo Orús Fabian Sigloch Soraya Sangiao José María De Teresa Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate
description	Focused Ion Beam-Induced Deposition (FIBID) is a single-step nanopatterning technique that applies a focused beam of ions to induce the decomposition of a gaseous precursor. The processing rate of FIBID increases by two orders of magnitude when the process is performed at cryogenic temperatures (Cryo-FIBID): the precursor forms a condensed layer on the surface of the cooled substrate, greatly enhancing the amount of material available for decomposition. Cryo-FIBID has been achieved so far by making use of liquid nitrogen-based cooling circuits, which require the passage of a flowing gas as a cooling agent. Here, the Cryo-FIBID of the W(CO)<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mn>6</mn></msub></semantics></math></inline-formula> precursor is performed using a coolant-free thermoelectric plate utilizing the Peltier effect. Performed at −60 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mrow></mrow><mo>∘</mo></msup></semantics></math></inline-formula>C, the procedure yields a W–C-based material with structural and electrical properties comparable to those of its counterpart grown in coolant-based Cryo-FIBID. The use of the thermoelectric plate significantly reduces the vibrations and sample drift induced by the flow of passing coolant gas and allows for the fabrication of similar nanostructures. In summary, the reported process represents a further step towards the practical implementation of the Cryo-FIBID technique, and it will facilitate its use by a broader research community.
format	article
author	Pablo Orús Fabian Sigloch Soraya Sangiao José María De Teresa
author_facet	Pablo Orús Fabian Sigloch Soraya Sangiao José María De Teresa
author_sort	Pablo Orús
title	Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate
title_short	Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate
title_full	Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate
title_fullStr	Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate
title_full_unstemmed	Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate
title_sort	cryo-focused ion beam-induced deposition of tungsten–carbon nanostructures using a thermoelectric plate
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/4062fad0b82f4e458816500582e8a566
work_keys_str_mv	AT pabloorus cryofocusedionbeaminduceddepositionoftungstencarbonnanostructuresusingathermoelectricplate AT fabiansigloch cryofocusedionbeaminduceddepositionoftungstencarbonnanostructuresusingathermoelectricplate AT sorayasangiao cryofocusedionbeaminduceddepositionoftungstencarbonnanostructuresusingathermoelectricplate AT josemariadeteresa cryofocusedionbeaminduceddepositionoftungstencarbonnanostructuresusingathermoelectricplate
_version_	1718436931049619456

Cryo-Focused Ion Beam-Induced Deposition of Tungsten–Carbon Nanostructures Using a Thermoelectric Plate

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