Nanomechanical parameters of new carbazolyle-containing photoresist polymers
The new photopolymer layers from carbazolemethacrylates (CAM) with oktylmethacrylates (OMA) and polyepoxypropylcarbazole (PEPC) were prepared and investigated by us. Load and depth sensing indentation with a Berkovich indenter were performed in order to evaluate...
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| Format: | article |
| Langue: | EN |
| Publié: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2005
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| Accès en ligne: | https://doaj.org/article/406632edf5c54e3fa22d67c73a67e00e |
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