A Novel High-Speed and High-Accuracy Mathematical Modeling Method of Complex MEMS Resonator Structures Based on the Multilayer Perceptron Neural Network

MEMS resonators have become core devices in a large number of fields; however, due to their complex structures, the finite element analysis (FEA) method is still the main method for their theoretical analysis. The traditional finite element analysis method faces the disadvantages of large calculatio...

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Autores principales: Qingsong Li, Kuo Lu, Kai Wu, Hao Zhang, Xiaopeng Sun, Xuezhong Wu, Dingbang Xiao
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/46f78252f0b6433798a7fc146bb058b5
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