A Novel High-Speed and High-Accuracy Mathematical Modeling Method of Complex MEMS Resonator Structures Based on the Multilayer Perceptron Neural Network
MEMS resonators have become core devices in a large number of fields; however, due to their complex structures, the finite element analysis (FEA) method is still the main method for their theoretical analysis. The traditional finite element analysis method faces the disadvantages of large calculatio...
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| Main Authors: | , , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
MDPI AG
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/46f78252f0b6433798a7fc146bb058b5 |
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