Gallium arsenate removal from waste waters
The aim of this paper is to study the loss of gallium (Ga) and arsenic (As) loss during the sedimentation of gallium arsenate (GaAsO4) from waste solutions of GaAs epitaxial production by chloride method. The solid wastes of this semiconductor manufacturing process are removed from technologica...
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| Auteurs principaux: | , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2005
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| Accès en ligne: | https://doaj.org/article/496d928461a64feaa4ae5437cddcf8a7 |
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