Simulating the fabrication of aluminium oxide tunnel junctions

Abstract Aluminium oxide (AlO x ) tunnel junctions are important components in a range of nanoelectric devices including superconducting qubits where they can be used as Josephson junctions. While many improvements in the reproducibility and reliability of qubits have been made possible through new...

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Bibliographic Details
Main Authors: M. J. Cyster, J. S. Smith, N. Vogt, G. Opletal, S. P. Russo, J. H. Cole
Format: article
Language:EN
Published: Nature Portfolio 2021
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Online Access:https://doaj.org/article/4a4e7f41868c48e98bbc1caf555d8d79
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