In-Situ Depth Measurement of Laser Micromachining

Precision laser micromachining plays an important role in the biomedical, electronics, and material processing industries. During laser drilling, precision depth detection with micrometer-level resolution is required, particularly with blind-hole or heterogeneous structures. We present an optical de...

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Autores principales: Xiaoming Chen, Ying Xu, Nan-Kuang Chen, Shannon Shy, Hsiang-Chen Chui
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/4b5f4d03ad3548f9bdd92378a27ca913
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