In-Situ Depth Measurement of Laser Micromachining

Precision laser micromachining plays an important role in the biomedical, electronics, and material processing industries. During laser drilling, precision depth detection with micrometer-level resolution is required, particularly with blind-hole or heterogeneous structures. We present an optical de...

Descripción completa

Guardado en:

Detalles Bibliográficos
Autores principales:	Xiaoming Chen, Ying Xu, Nan-Kuang Chen, Shannon Shy, Hsiang-Chen Chui
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	laser machining depth measurement confocal structure Applied optics. Photonics TA1501-1820
Acceso en línea:	https://doaj.org/article/4b5f4d03ad3548f9bdd92378a27ca913
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

id	oai:doaj.org-article:4b5f4d03ad3548f9bdd92378a27ca913
record_format	dspace
spelling	oai:doaj.org-article:4b5f4d03ad3548f9bdd92378a27ca9132021-11-25T18:43:21ZIn-Situ Depth Measurement of Laser Micromachining10.3390/photonics81104932304-6732https://doaj.org/article/4b5f4d03ad3548f9bdd92378a27ca9132021-11-01T00:00:00Zhttps://www.mdpi.com/2304-6732/8/11/493https://doaj.org/toc/2304-6732Precision laser micromachining plays an important role in the biomedical, electronics, and material processing industries. During laser drilling, precision depth detection with micrometer-level resolution is required, particularly with blind-hole or heterogeneous structures. We present an optical detection system utilizing an optical confocal structure, experimentally confirmed to achieve a >95% accuracy for micron-diameter holes that are tens-of-microns deep. This system can be easily integrated into commercial laser micromachining processes, and can be employed in laser drilling and three-dimensional active-feedback laser printing.Xiaoming ChenYing XuNan-Kuang ChenShannon ShyHsiang-Chen ChuiMDPI AGarticlelaser machiningdepth measurementconfocal structureApplied optics. PhotonicsTA1501-1820ENPhotonics, Vol 8, Iss 493, p 493 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	laser machining depth measurement confocal structure Applied optics. Photonics TA1501-1820
spellingShingle	laser machining depth measurement confocal structure Applied optics. Photonics TA1501-1820 Xiaoming Chen Ying Xu Nan-Kuang Chen Shannon Shy Hsiang-Chen Chui In-Situ Depth Measurement of Laser Micromachining
description	Precision laser micromachining plays an important role in the biomedical, electronics, and material processing industries. During laser drilling, precision depth detection with micrometer-level resolution is required, particularly with blind-hole or heterogeneous structures. We present an optical detection system utilizing an optical confocal structure, experimentally confirmed to achieve a >95% accuracy for micron-diameter holes that are tens-of-microns deep. This system can be easily integrated into commercial laser micromachining processes, and can be employed in laser drilling and three-dimensional active-feedback laser printing.
format	article
author	Xiaoming Chen Ying Xu Nan-Kuang Chen Shannon Shy Hsiang-Chen Chui
author_facet	Xiaoming Chen Ying Xu Nan-Kuang Chen Shannon Shy Hsiang-Chen Chui
author_sort	Xiaoming Chen
title	In-Situ Depth Measurement of Laser Micromachining
title_short	In-Situ Depth Measurement of Laser Micromachining
title_full	In-Situ Depth Measurement of Laser Micromachining
title_fullStr	In-Situ Depth Measurement of Laser Micromachining
title_full_unstemmed	In-Situ Depth Measurement of Laser Micromachining
title_sort	in-situ depth measurement of laser micromachining
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/4b5f4d03ad3548f9bdd92378a27ca913
work_keys_str_mv	AT xiaomingchen insitudepthmeasurementoflasermicromachining AT yingxu insitudepthmeasurementoflasermicromachining AT nankuangchen insitudepthmeasurementoflasermicromachining AT shannonshy insitudepthmeasurementoflasermicromachining AT hsiangchenchui insitudepthmeasurementoflasermicromachining
_version_	1718410769293377536

In-Situ Depth Measurement of Laser Micromachining

Ejemplares similares