Boron-Doped Diamond/GaN Heterojunction—The Influence of the Low-Temperature Deposition
We report a method of growing a boron-doped diamond film by plasma-assisted chemical vapour deposition utilizing a pre-treatment of GaN substrate to give a high density of nucleation. CVD diamond was deposited on GaN substrate grown epitaxially via the molecular-beam epitaxy process. To obtain a con...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
MDPI AG
2021
|
| Subjects: | |
| Online Access: | https://doaj.org/article/4c24603b3c5746c3bfe75322db523abc |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|