Wide band UV/Vis/NIR blazed-binary reflective gratings: two lithographic techniques investigation
We report on subwavelength reflective gratings for hyperspectral applications operating in the 340 nm-1040 nm spectral range. The blazed grating period is 30 μm and is composed of 2D subwavelength binary structures with sizes in-between 120 nm and 350 nm. We demonstrate the manufacturing of gratings...
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| Auteurs principaux: | , , , , , , , , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
EDP Sciences
2021
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/4d38697559564c00aca8dc12e358d4eb |
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