Wide band UV/Vis/NIR blazed-binary reflective gratings: two lithographic techniques investigation

We report on subwavelength reflective gratings for hyperspectral applications operating in the 340 nm-1040 nm spectral range. The blazed grating period is 30 μm and is composed of 2D subwavelength binary structures with sizes in-between 120 nm and 350 nm. We demonstrate the manufacturing of gratings...

Descripción completa

Guardado en:
Detalles Bibliográficos
Autores principales: Lee Mane-Si Laure, Cholet Julie, Delboulbé Anne, Guillemet Raphaël, Loiseaux Brigitte, Garabedian Patrick, Flügel-Paul Thomas, Benkenstein Tino, Sadlowski Susann, Tetaz Nicolas, Windpassinger Roman, Mahalik Saroj
Formato: article
Lenguaje:EN
Publicado: EDP Sciences 2021
Materias:
Acceso en línea:https://doaj.org/article/4d38697559564c00aca8dc12e358d4eb
Etiquetas: Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!