Wide band UV/Vis/NIR blazed-binary reflective gratings: two lithographic techniques investigation
We report on subwavelength reflective gratings for hyperspectral applications operating in the 340 nm-1040 nm spectral range. The blazed grating period is 30 μm and is composed of 2D subwavelength binary structures with sizes in-between 120 nm and 350 nm. We demonstrate the manufacturing of gratings...
Saved in:
| Main Authors: | , , , , , , , , , , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
EDP Sciences
2021
|
| Subjects: | |
| Online Access: | https://doaj.org/article/4d38697559564c00aca8dc12e358d4eb |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!