Photonic crystal nanobeam cavities with lateral fins

We present the design, fabrication, and characterization of suspended arrays of small volume, high quality factor (Q) silicon nitride photonic crystal nanobeam (PCNB) cavities with lateral nanorod fin structures. By controlling the alignment position of the fins with respect to the air holes, the re...

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Autores principales: Liu Zhonghe, Chen Yudong, Ge Xiaochen, Zhou Weidong
Formato: article
Lenguaje:EN
Publicado: De Gruyter 2021
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Acceso en línea:https://doaj.org/article/4e35a09133b34b6cbaf3686bc41a51a8
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