Photonic crystal nanobeam cavities with lateral fins

We present the design, fabrication, and characterization of suspended arrays of small volume, high quality factor (Q) silicon nitride photonic crystal nanobeam (PCNB) cavities with lateral nanorod fin structures. By controlling the alignment position of the fins with respect to the air holes, the re...

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Autores principales:	Liu Zhonghe, Chen Yudong, Ge Xiaochen, Zhou Weidong
Formato:	article
Lenguaje:	EN
Publicado:	De Gruyter 2021
Materias:	fin structure nanobeam photonic crystal Physics QC1-999
Acceso en línea:	https://doaj.org/article/4e35a09133b34b6cbaf3686bc41a51a8
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id	oai:doaj.org-article:4e35a09133b34b6cbaf3686bc41a51a8
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spelling	oai:doaj.org-article:4e35a09133b34b6cbaf3686bc41a51a82021-12-05T14:10:56ZPhotonic crystal nanobeam cavities with lateral fins2192-861410.1515/nanoph-2021-0361https://doaj.org/article/4e35a09133b34b6cbaf3686bc41a51a82021-09-01T00:00:00Zhttps://doi.org/10.1515/nanoph-2021-0361https://doaj.org/toc/2192-8614We present the design, fabrication, and characterization of suspended arrays of small volume, high quality factor (Q) silicon nitride photonic crystal nanobeam (PCNB) cavities with lateral nanorod fin structures. By controlling the alignment position of the fins with respect to the air holes, the resonance wavelength and Q-factor of the PCNB cavities can be tuned to realize the desired performance. Measured tunable range of 2 × 104 and 10 nm is achieved for Q-factor and resonance wavelength, respectively, with the highest Q-factor measured at 2.5 × 104. Incorporating such nanorod fins into the nanobeam cavity is demonstrated to provide improved mechanical support, thermal transport, and channels of lateral carrier injection for the suspended PCNB. The proposed PCNB cavities with lateral fins are advantageous for energy efficient, ultra-compact lasers, modulators, filters, and sensors.Liu ZhongheChen YudongGe XiaochenZhou WeidongDe Gruyterarticlefin structurenanobeamphotonic crystalPhysicsQC1-999ENNanophotonics, Vol 10, Iss 15, Pp 3889-3894 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	fin structure nanobeam photonic crystal Physics QC1-999
spellingShingle	fin structure nanobeam photonic crystal Physics QC1-999 Liu Zhonghe Chen Yudong Ge Xiaochen Zhou Weidong Photonic crystal nanobeam cavities with lateral fins
description	We present the design, fabrication, and characterization of suspended arrays of small volume, high quality factor (Q) silicon nitride photonic crystal nanobeam (PCNB) cavities with lateral nanorod fin structures. By controlling the alignment position of the fins with respect to the air holes, the resonance wavelength and Q-factor of the PCNB cavities can be tuned to realize the desired performance. Measured tunable range of 2 × 104 and 10 nm is achieved for Q-factor and resonance wavelength, respectively, with the highest Q-factor measured at 2.5 × 104. Incorporating such nanorod fins into the nanobeam cavity is demonstrated to provide improved mechanical support, thermal transport, and channels of lateral carrier injection for the suspended PCNB. The proposed PCNB cavities with lateral fins are advantageous for energy efficient, ultra-compact lasers, modulators, filters, and sensors.
format	article
author	Liu Zhonghe Chen Yudong Ge Xiaochen Zhou Weidong
author_facet	Liu Zhonghe Chen Yudong Ge Xiaochen Zhou Weidong
author_sort	Liu Zhonghe
title	Photonic crystal nanobeam cavities with lateral fins
title_short	Photonic crystal nanobeam cavities with lateral fins
title_full	Photonic crystal nanobeam cavities with lateral fins
title_fullStr	Photonic crystal nanobeam cavities with lateral fins
title_full_unstemmed	Photonic crystal nanobeam cavities with lateral fins
title_sort	photonic crystal nanobeam cavities with lateral fins
publisher	De Gruyter
publishDate	2021
url	https://doaj.org/article/4e35a09133b34b6cbaf3686bc41a51a8
work_keys_str_mv	AT liuzhonghe photoniccrystalnanobeamcavitieswithlateralfins AT chenyudong photoniccrystalnanobeamcavitieswithlateralfins AT gexiaochen photoniccrystalnanobeamcavitieswithlateralfins AT zhouweidong photoniccrystalnanobeamcavitieswithlateralfins
_version_	1718371534085554176

Photonic crystal nanobeam cavities with lateral fins

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