Photonic crystal nanobeam cavities with lateral fins
We present the design, fabrication, and characterization of suspended arrays of small volume, high quality factor (Q) silicon nitride photonic crystal nanobeam (PCNB) cavities with lateral nanorod fin structures. By controlling the alignment position of the fins with respect to the air holes, the re...
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| Main Authors: | , , , |
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| Format: | article |
| Language: | EN |
| Published: |
De Gruyter
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/4e35a09133b34b6cbaf3686bc41a51a8 |
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