A thermomechanical description of the mold filling process in roll-to-roll nanoimprinting lithography
We derive the constitutive equations for a viscoelastic fluid that is undergoing a continuous mold filling process at the nanoscale within the context of a thermomechanical framework. The governing equations are obtained by substituting the constitutive equations into the appropriate balance laws. F...
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| Auteurs principaux: | , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Elsevier
2020
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/4eaa0b682f6048b2a087072fdd06bd0a |
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