Nanoindentation response of semiconductors

The paper reviews the nanoindentation behaviour of semiconductors under concentrated load. We consider first, fundamental aspects regarding the mechanical resistance to contact loading of semiconductor single crystals (indentation strain, hardness-yield stress relationship). Then, the paper summa...

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Bibliographic Details
Main Authors: LeBourhis, E., Patriarche, G.
Format: article
Language:EN
Published: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2008
Subjects:
Online Access:https://doaj.org/article/4f29f9cd3f8b46c4ab59cdf013c48eca
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