Nanoindentation response of semiconductors

The paper reviews the nanoindentation behaviour of semiconductors under concentrated load. We consider first, fundamental aspects regarding the mechanical resistance to contact loading of semiconductor single crystals (indentation strain, hardness-yield stress relationship). Then, the paper summa...

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Detalles Bibliográficos
Autores principales: LeBourhis, E., Patriarche, G.
Formato: article
Lenguaje:EN
Publicado: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2008
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Acceso en línea:https://doaj.org/article/4f29f9cd3f8b46c4ab59cdf013c48eca
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Sumario:The paper reviews the nanoindentation behaviour of semiconductors under concentrated load. We consider first, fundamental aspects regarding the mechanical resistance to contact loading of semiconductor single crystals (indentation strain, hardness-yield stress relationship). Then, the paper summarizes recent studies regarding nanoindentation structure and geometrical size effect.