Nanoindentation response of semiconductors
The paper reviews the nanoindentation behaviour of semiconductors under concentrated load. We consider first, fundamental aspects regarding the mechanical resistance to contact loading of semiconductor single crystals (indentation strain, hardness-yield stress relationship). Then, the paper summa...
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| Auteurs principaux: | , |
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| Format: | article |
| Langue: | EN |
| Publié: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2008
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/4f29f9cd3f8b46c4ab59cdf013c48eca |
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| Résumé: | The paper reviews the nanoindentation behaviour of semiconductors under concentrated
load. We consider first, fundamental aspects regarding the mechanical resistance to contact
loading of semiconductor single crystals (indentation strain, hardness-yield stress relationship). Then, the paper summarizes recent studies regarding nanoindentation structure and
geometrical size effect.
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