Diffraction phase microscopy imaging and multi-physics modeling of the nanoscale thermal expansion of a suspended resistor
Abstract We studied the nanoscale thermal expansion of a suspended resistor both theoretically and experimentally and obtained consistent results. In the theoretical analysis, we used a three-dimensional coupled electrical-thermal-mechanical simulation and obtained the temperature and displacement f...
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Autores principales: | , , , , |
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Formato: | article |
Lenguaje: | EN |
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Nature Portfolio
2017
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Materias: | |
Acceso en línea: | https://doaj.org/article/4fff078a3c524adf96b9f99709003851 |
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