Diffraction phase microscopy imaging and multi-physics modeling of the nanoscale thermal expansion of a suspended resistor

Abstract We studied the nanoscale thermal expansion of a suspended resistor both theoretically and experimentally and obtained consistent results. In the theoretical analysis, we used a three-dimensional coupled electrical-thermal-mechanical simulation and obtained the temperature and displacement f...

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Autores principales: Xiaozhen Wang, Tianjian Lu, Xin Yu, Jian-Ming Jin, Lynford L. Goddard
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2017
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Acceso en línea:https://doaj.org/article/4fff078a3c524adf96b9f99709003851
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