Combined magnetron sputtering and pulsed laser deposition of TiO 2 and BFCO thin films

Abstract We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films. The PLD and MS simultaneously use the same target, leading to an enhanced deposition rate. The performance of this techniqu...

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Bibliographic Details
Main Authors: D. Benetti, R. Nouar, R. Nechache, H. Pepin, A. Sarkissian, F. Rosei, J. M. MacLeod
Format: article
Language:EN
Published: Nature Portfolio 2017
Subjects:
R
Q
Online Access:https://doaj.org/article/53110acabebe435a90f3c7bb71769340
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