Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope

Improvement of the sensitivity of a dual-axis probe for friction force microscopy is presented. The dual-axis micro-mechanical probe combines a double cantilever and torsion beams. This probe could reduce the mechanical cross-talk between the lateral and vertical force detections. In addition, dual-...

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Bibliographic Details
Main Authors: Hiroaki Amakawa, Kenji Fukuzawa, Mitsuhiro Shikida, Hedong Zhang, Shintaro Itoh
Format: article
Language:EN
Published: Japanese Society of Tribologists 2008
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Online Access:https://doaj.org/article/532b8d4dd9af4ce2b130e8a18c80f48a
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