Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope

Improvement of the sensitivity of a dual-axis probe for friction force microscopy is presented. The dual-axis micro-mechanical probe combines a double cantilever and torsion beams. This probe could reduce the mechanical cross-talk between the lateral and vertical force detections. In addition, dual-...

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Autores principales:	Hiroaki Amakawa, Kenji Fukuzawa, Mitsuhiro Shikida, Hedong Zhang, Shintaro Itoh
Formato:	article
Lenguaje:	EN
Publicado:	Japanese Society of Tribologists 2008
Materias:	friction force microscope micromachining optical light lever method Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/532b8d4dd9af4ce2b130e8a18c80f48a
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spelling	oai:doaj.org-article:532b8d4dd9af4ce2b130e8a18c80f48a2021-11-05T09:28:35ZImproved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope1881-219810.2474/trol.3.356https://doaj.org/article/532b8d4dd9af4ce2b130e8a18c80f48a2008-12-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/trol/3/7/3_7_356/_pdf/-char/enhttps://doaj.org/toc/1881-2198Improvement of the sensitivity of a dual-axis probe for friction force microscopy is presented. The dual-axis micro-mechanical probe combines a double cantilever and torsion beams. This probe could reduce the mechanical cross-talk between the lateral and vertical force detections. In addition, dual-axis forces can be detected by measuring the dual-axis displacement of the probe end using the optical lever-based method. A low reflection region is formed at the probe end. The region is irradiated with an optical lever laser light and the reflected light is focused onto a four-segmented photo diode (PD). The lateral force can be detected by measuring the displacement of the probe end using the dark region displacement on PD. A shallow step structure was used as a low reflection region in our previous study. However, its darkness was not enough and the improvement of the sensitivity was difficult. In this paper, a new type of low reflection region is presented. The low reflection region using a slope-structure could improve the lateral deflection sensitivity by a factor of 1.4 as compared with conventional one. And the minimum detection limits of the lateral deflection and force were of the order of 1 nm and 1 nN, respectively. This leads to accurate investigation of nanotribological phenomena.Hiroaki AmakawaKenji FukuzawaMitsuhiro ShikidaHedong ZhangShintaro ItohJapanese Society of Tribologistsarticlefriction force microscopemicromachiningoptical light lever methodPhysicsQC1-999Engineering (General). Civil engineering (General)TA1-2040Mechanical engineering and machineryTJ1-1570ChemistryQD1-999ENTribology Online, Vol 3, Iss 7, Pp 356-360 (2008)
institution	DOAJ
collection	DOAJ
language	EN
topic	friction force microscope micromachining optical light lever method Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
spellingShingle	friction force microscope micromachining optical light lever method Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999 Hiroaki Amakawa Kenji Fukuzawa Mitsuhiro Shikida Hedong Zhang Shintaro Itoh Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope
description	Improvement of the sensitivity of a dual-axis probe for friction force microscopy is presented. The dual-axis micro-mechanical probe combines a double cantilever and torsion beams. This probe could reduce the mechanical cross-talk between the lateral and vertical force detections. In addition, dual-axis forces can be detected by measuring the dual-axis displacement of the probe end using the optical lever-based method. A low reflection region is formed at the probe end. The region is irradiated with an optical lever laser light and the reflected light is focused onto a four-segmented photo diode (PD). The lateral force can be detected by measuring the displacement of the probe end using the dark region displacement on PD. A shallow step structure was used as a low reflection region in our previous study. However, its darkness was not enough and the improvement of the sensitivity was difficult. In this paper, a new type of low reflection region is presented. The low reflection region using a slope-structure could improve the lateral deflection sensitivity by a factor of 1.4 as compared with conventional one. And the minimum detection limits of the lateral deflection and force were of the order of 1 nm and 1 nN, respectively. This leads to accurate investigation of nanotribological phenomena.
format	article
author	Hiroaki Amakawa Kenji Fukuzawa Mitsuhiro Shikida Hedong Zhang Shintaro Itoh
author_facet	Hiroaki Amakawa Kenji Fukuzawa Mitsuhiro Shikida Hedong Zhang Shintaro Itoh
author_sort	Hiroaki Amakawa
title	Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope
title_short	Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope
title_full	Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope
title_fullStr	Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope
title_full_unstemmed	Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope
title_sort	improved sensitivity of dual-axis micro-mechanical probe for friction force microscope
publisher	Japanese Society of Tribologists
publishDate	2008
url	https://doaj.org/article/532b8d4dd9af4ce2b130e8a18c80f48a
work_keys_str_mv	AT hiroakiamakawa improvedsensitivityofdualaxismicromechanicalprobeforfrictionforcemicroscope AT kenjifukuzawa improvedsensitivityofdualaxismicromechanicalprobeforfrictionforcemicroscope AT mitsuhiroshikida improvedsensitivityofdualaxismicromechanicalprobeforfrictionforcemicroscope AT hedongzhang improvedsensitivityofdualaxismicromechanicalprobeforfrictionforcemicroscope AT shintaroitoh improvedsensitivityofdualaxismicromechanicalprobeforfrictionforcemicroscope
_version_	1718444348468625408

Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope

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