Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope
Improvement of the sensitivity of a dual-axis probe for friction force microscopy is presented. The dual-axis micro-mechanical probe combines a double cantilever and torsion beams. This probe could reduce the mechanical cross-talk between the lateral and vertical force detections. In addition, dual-...
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| Auteurs principaux: | , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Japanese Society of Tribologists
2008
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/532b8d4dd9af4ce2b130e8a18c80f48a |
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