Enhanced ferroelectric switching speed of Si-doped HfO2 thin film tailored by oxygen deficiency

Abstract Investigations concerning oxygen deficiency will increase our understanding of those factors that govern the overall material properties. Various studies have examined the relationship between oxygen deficiency and the phase transformation from a nonpolar phase to a polar phase in HfO2 thin...

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Autores principales: Kyoungjun Lee, Kunwoo Park, Hyun-Jae Lee, Myeong Seop Song, Kyu Cheol Lee, Jin Namkung, Jun Hee Lee, Jungwon Park, Seung Chul Chae
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2021
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Acceso en línea:https://doaj.org/article/54100e1171b5496c96e61a4182e053c2
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