Thermodynamics of deposition flux-dependent intrinsic film stress
Vapour deposition on polycrystalline films can lead to unexpectedly high and reversible compressive stress, the origin of which remains unclear. Here, the authors show, using thermodynamic arguments, that entropic effects in the extremely dilute adatom gas on the surface play a major role.
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| Autores principales: | , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2016
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/55bb0f1aeb7b42d091eb0c31b0eb2356 |
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