Thermodynamics of deposition flux-dependent intrinsic film stress

Vapour deposition on polycrystalline films can lead to unexpectedly high and reversible compressive stress, the origin of which remains unclear. Here, the authors show, using thermodynamic arguments, that entropic effects in the extremely dilute adatom gas on the surface play a major role.

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Autores principales:	Amirmehdi Saedi, Marcel J. Rost
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2016
Materias:	Science Q
Acceso en línea:	https://doaj.org/article/55bb0f1aeb7b42d091eb0c31b0eb2356
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spelling	oai:doaj.org-article:55bb0f1aeb7b42d091eb0c31b0eb23562021-12-02T14:39:13ZThermodynamics of deposition flux-dependent intrinsic film stress10.1038/ncomms107332041-1723https://doaj.org/article/55bb0f1aeb7b42d091eb0c31b0eb23562016-02-01T00:00:00Zhttps://doi.org/10.1038/ncomms10733https://doaj.org/toc/2041-1723Vapour deposition on polycrystalline films can lead to unexpectedly high and reversible compressive stress, the origin of which remains unclear. Here, the authors show, using thermodynamic arguments, that entropic effects in the extremely dilute adatom gas on the surface play a major role.Amirmehdi SaediMarcel J. RostNature PortfolioarticleScienceQENNature Communications, Vol 7, Iss 1, Pp 1-6 (2016)
institution	DOAJ
collection	DOAJ
language	EN
topic	Science Q
spellingShingle	Science Q Amirmehdi Saedi Marcel J. Rost Thermodynamics of deposition flux-dependent intrinsic film stress
description	Vapour deposition on polycrystalline films can lead to unexpectedly high and reversible compressive stress, the origin of which remains unclear. Here, the authors show, using thermodynamic arguments, that entropic effects in the extremely dilute adatom gas on the surface play a major role.
format	article
author	Amirmehdi Saedi Marcel J. Rost
author_facet	Amirmehdi Saedi Marcel J. Rost
author_sort	Amirmehdi Saedi
title	Thermodynamics of deposition flux-dependent intrinsic film stress
title_short	Thermodynamics of deposition flux-dependent intrinsic film stress
title_full	Thermodynamics of deposition flux-dependent intrinsic film stress
title_fullStr	Thermodynamics of deposition flux-dependent intrinsic film stress
title_full_unstemmed	Thermodynamics of deposition flux-dependent intrinsic film stress
title_sort	thermodynamics of deposition flux-dependent intrinsic film stress
publisher	Nature Portfolio
publishDate	2016
url	https://doaj.org/article/55bb0f1aeb7b42d091eb0c31b0eb2356
work_keys_str_mv	AT amirmehdisaedi thermodynamicsofdepositionfluxdependentintrinsicfilmstress AT marceljrost thermodynamicsofdepositionfluxdependentintrinsicfilmstress
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Thermodynamics of deposition flux-dependent intrinsic film stress

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