Development of a High-Resolution Acoustic Sensor Based on ZnO Film Deposited by the RF Magnetron Sputtering Method

Development of a High-Resolution Acoustic Sensor Based on ZnO Film Deposited by the RF Magnetron Sputtering Method

In the study, an acoustic sensor for a high-resolution acoustic microscope was fabricated using zinc oxide (ZnO) piezoelectric ceramics. The c-cut sapphire was processed into a lens shape to deposit a ZnO film using radio frequency (RF) magnetron sputtering, and an upper and a lower electrode were d...

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Detalles Bibliográficos
Autores principales: Dong-Chan Kang, Jeong-Nyeon Kim, Ik-Keun Park
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
high-resolution scanning acoustic microscope (HR-SAM)
zinc oxide film
piezoelectric ceramics
acoustic sensor
Technology
T
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Engineering (General). Civil engineering (General)
TA1-2040
Microscopy
QH201-278.5
Descriptive and experimental mechanics
QC120-168.85
Acceso en línea:https://doaj.org/article/570c69667d414eb28aca04165f8dd1d6
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https://doaj.org/article/570c69667d414eb28aca04165f8dd1d6

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