Effects of Zr/(Zr+Ti) Molar Ratio on the Phase Structure and Hardness of Ti<sub>x</sub>Zr<sub>1−x</sub>N Films

Effects of Zr/(Zr+Ti) Molar Ratio on the Phase Structure and Hardness of Ti<sub>x</sub>Zr<sub>1−x</sub>N Films

Ti<sub>x</sub>Zr<sub>1−x</sub>N hard films with Zr/(Zr+Ti) molar ratios from 20% to 80% were prepared by multi-arc ion plating using any two of elemental Ti, elemental Zr, and TiZr alloy targets. The as-deposited Ti<sub>x</sub>Zr<sub>1−x</sub>N films d...

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Detalles Bibliográficos
Autores principales: Jun Zhang, Lijing Peng, Xiaoyang Wang, Dongling Liu, Nan Wang
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
Ti<sub>x</sub>Zr<sub>1−x</sub>N hard film
Zr/(Zr+Ti) molar ratio
phase structure
preferred growth orientation
hardness
Engineering (General). Civil engineering (General)
TA1-2040
Acceso en línea:https://doaj.org/article/61ef184f799744dd937a82fd50eb914f
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