Effects of Zr/(Zr+Ti) Molar Ratio on the Phase Structure and Hardness of Ti<sub>x</sub>Zr<sub>1−x</sub>N Films
Ti<sub>x</sub>Zr<sub>1−x</sub>N hard films with Zr/(Zr+Ti) molar ratios from 20% to 80% were prepared by multi-arc ion plating using any two of elemental Ti, elemental Zr, and TiZr alloy targets. The as-deposited Ti<sub>x</sub>Zr<sub>1−x</sub>N films d...
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| Auteurs principaux: | , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
MDPI AG
2021
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| Accès en ligne: | https://doaj.org/article/61ef184f799744dd937a82fd50eb914f |
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