Substrate-Driven Atomic Layer Deposition of High-κ Dielectrics on 2D Materials

Atomic layer deposition (ALD) of high-κ dielectrics on two-dimensional (2D) materials (including graphene and transition metal dichalcogenides) still represents a challenge due to the lack of out-of-plane bonds on the pristine surfaces of 2D materials, thus making the nucleation process highly disad...

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Autores principales: Emanuela Schilirò, Raffaella Lo Nigro, Fabrizio Roccaforte, Filippo Giannazzo
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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ALD
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Acceso en línea:https://doaj.org/article/69690cf09bd44f228ad8bb72277bc293
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