Effect of the Graded Silicon Content in SRN/SRO Multilayer Structures on the Si Nanocrystals and Si Nanopyramids Formation and Their Photoluminescence Response

Effect of the Graded Silicon Content in SRN/SRO Multilayer Structures on the Si Nanocrystals and Si Nanopyramids Formation and Their Photoluminescence Response

Two multilayer (ML) structures, composed of five layers of silicon-rich oxide (SRO) with different Si contents and a sixth layer of silicon-rich nitride (SRN), were deposited by low pressure chemical vapor deposition. These SRN/SRO MLs were thermally annealed at 1100 °C for 180 min in ambient N<s...

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Detalles Bibliográficos
Autores principales: José Juan Avilés Bravo, Santiago Antonio Cabañas Tay, Liliana Palacios Huerta, Karla Esther González Flores, Javier Flores Méndez, Mario Moreno Moreno, Alfredo Morales Sánchez
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
graded SRN/SRO multilayer
Si-nanocrystals
Si-nanopyramids
photoluminescence
LPCVD
Technology
T
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Engineering (General). Civil engineering (General)
TA1-2040
Microscopy
QH201-278.5
Descriptive and experimental mechanics
QC120-168.85
Acceso en línea:https://doaj.org/article/6c4b96cea3a443a79989ba9418652608
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https://doaj.org/article/6c4b96cea3a443a79989ba9418652608

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