Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers

Photoelectrochemical etching of GaN in different solutions such as KOH, HF/H2O2/C2H5OH and oxalic acid was performed. The results of scanning electron microscopy cathodoluminescence analysis of the etched samples are presented.

Guardado en:
Detalles Bibliográficos
Autor principal: Popa, Valeriu
Formato: article
Lenguaje:EN
Publicado: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2005
Materias:
Acceso en línea:https://doaj.org/article/73c563e24d8a40a389880a4f73ef2ce8
Etiquetas: Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!