Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers

Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers

Photoelectrochemical etching of GaN in different solutions such as KOH, HF/H2O2/C2H5OH and oxalic acid was performed. The results of scanning electron microscopy cathodoluminescence analysis of the etched samples are presented.

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Autor principal: Popa, Valeriu
Formato: article
Lenguaje:EN
Publicado: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2005
Materias:
Physics
QC1-999
Electronics
TK7800-8360
Acceso en línea:https://doaj.org/article/73c563e24d8a40a389880a4f73ef2ce8
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spelling oai:doaj.org-article:73c563e24d8a40a389880a4f73ef2ce82021-11-21T12:13:45ZMorphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers2537-63651810-648Xhttps://doaj.org/article/73c563e24d8a40a389880a4f73ef2ce82005-01-01T00:00:00Zhttps://mjps.nanotech.md/archive/2005/article/3084https://doaj.org/toc/1810-648Xhttps://doaj.org/toc/2537-6365Photoelectrochemical etching of GaN in different solutions such as KOH, HF/H2O2/C2H5OH and oxalic acid was performed. The results of scanning electron microscopy cathodoluminescence analysis of the etched samples are presented. Popa, ValeriuD.Ghitu Institute of Electronic Engineering and NanotechnologiesarticlePhysicsQC1-999ElectronicsTK7800-8360ENMoldavian Journal of the Physical Sciences, Vol 4, Iss 1, Pp 125-129 (2005)
institution DOAJ
collection DOAJ
language EN
topic Physics
QC1-999
Electronics
TK7800-8360
spellingShingle Physics
QC1-999
Electronics
TK7800-8360
Popa, Valeriu
Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers
description Photoelectrochemical etching of GaN in different solutions such as KOH, HF/H2O2/C2H5OH and oxalic acid was performed. The results of scanning electron microscopy cathodoluminescence analysis of the etched samples are presented.
format article
author Popa, Valeriu
author_facet Popa, Valeriu
author_sort Popa, Valeriu
title Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers
title_short Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers
title_full Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers
title_fullStr Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers
title_full_unstemmed Morphology study and cathodoluminescence microanalysis of photoelectrochemically etched GaN epilayers
title_sort morphology study and cathodoluminescence microanalysis of photoelectrochemically etched gan epilayers
publisher D.Ghitu Institute of Electronic Engineering and Nanotechnologies
publishDate 2005
url https://doaj.org/article/73c563e24d8a40a389880a4f73ef2ce8
work_keys_str_mv AT popavaleriu morphologystudyandcathodoluminescencemicroanalysisofphotoelectrochemicallyetchedganepilayers
_version_ 1718419129932709888

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