Investigation of the influence of plasma source power on the properties of magnetron sputtered Ta2O5 thin films

To enable the production of sophisticated optical interference coating designs, coatings with very low absorption and stray light losses and excellent layer thickness deposition accuracy are required. The selection and optimization of suitable coating materials and deposition processes are consequen...

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Autores principales: Bärtschi Manuel, Schachtler Daniel, Schwyn-Thöny Silvia, Südmeyer Thomas, Botha Roelene
Formato: article
Lenguaje:EN
Publicado: EDP Sciences 2021
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Acceso en línea:https://doaj.org/article/7628a529ba534d1b9e2ff13e8c6aad37
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