Manuel, B., Daniel, S., Silvia, S., Thomas, S., & Roelene, B. (2021). Investigation of the influence of plasma source power on the properties of magnetron sputtered Ta2O5 thin films. EDP Sciences.
Style de citation Chicago (17e éd.)Manuel, Bärtschi, Schachtler Daniel, Schwyn-Thöny Silvia, Südmeyer Thomas, et Botha Roelene. Investigation of the Influence of Plasma Source Power on the Properties of Magnetron Sputtered Ta2O5 Thin Films. EDP Sciences, 2021.
Style de citation MLA (8e éd.)Manuel, Bärtschi, et al. Investigation of the Influence of Plasma Source Power on the Properties of Magnetron Sputtered Ta2O5 Thin Films. EDP Sciences, 2021.
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