APA (7th ed.) Citation

Manuel, B., Daniel, S., Silvia, S., Thomas, S., & Roelene, B. (2021). Investigation of the influence of plasma source power on the properties of magnetron sputtered Ta2O5 thin films. EDP Sciences.

Chicago Style (17th ed.) Citation

Manuel, Bärtschi, Schachtler Daniel, Schwyn-Thöny Silvia, Südmeyer Thomas, and Botha Roelene. Investigation of the Influence of Plasma Source Power on the Properties of Magnetron Sputtered Ta2O5 Thin Films. EDP Sciences, 2021.

MLA (8th ed.) Citation

Manuel, Bärtschi, et al. Investigation of the Influence of Plasma Source Power on the Properties of Magnetron Sputtered Ta2O5 Thin Films. EDP Sciences, 2021.