Cita APA (7a ed.)

Manuel, B., Daniel, S., Silvia, S., Thomas, S., & Roelene, B. (2021). Investigation of the influence of plasma source power on the properties of magnetron sputtered Ta2O5 thin films. EDP Sciences.

Cita Chicago Style (17a ed.)

Manuel, Bärtschi, Schachtler Daniel, Schwyn-Thöny Silvia, Südmeyer Thomas, y Botha Roelene. Investigation of the Influence of Plasma Source Power on the Properties of Magnetron Sputtered Ta2O5 Thin Films. EDP Sciences, 2021.

Cita MLA (8a ed.)

Manuel, Bärtschi, et al. Investigation of the Influence of Plasma Source Power on the Properties of Magnetron Sputtered Ta2O5 Thin Films. EDP Sciences, 2021.