Investigation of the influence of plasma source power on the properties of magnetron sputtered Ta2O5 thin films
To enable the production of sophisticated optical interference coating designs, coatings with very low absorption and stray light losses and excellent layer thickness deposition accuracy are required. The selection and optimization of suitable coating materials and deposition processes are consequen...
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| Main Authors: | , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
EDP Sciences
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/7628a529ba534d1b9e2ff13e8c6aad37 |
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