Nano- and microscratching as a potential method for texturing the Si surface

The possibility of Si texturing through the use of nano- and microscratching with subsequent chemical etching has been investigated. The influence of the scratching speed, orientation of the indenter (face-on, edge-on) and normal load on the mechanism of deformation during scratching has been analyz...

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Autores principales: Prisăcaru, Andrian, Şikimaka, Olga, Harea, Evghenii, Burlacu, Alexandru, Enachi, Mihail, Branişte, Fiodor
Formato: article
Lenguaje:EN
Publicado: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2014
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Acceso en línea:https://doaj.org/article/777fca9c3662401a8716c0f834a44d87
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