Impact of sandwiched strain periodic multilayer AlN/GaN on strain and crystalline quality of a-plane GaN
Abstract We demonstrated high-quality single crystalline a-plane undoped-gallium nitride grown on a nonpatterned r-plane sapphire substrate via metal–organic chemical vapor deposition. The effect of four different numbers of sandwiched strain-periodic AlN/GaN multilayers on the strain state, crystal...
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Main Authors: | , , , , , , |
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Format: | article |
Language: | EN |
Published: |
Nature Portfolio
2021
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Subjects: | |
Online Access: | https://doaj.org/article/7973d3a047ab4ebca3785ec8ad2522eb |
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