6D planar magnetic levitation system - PIMag 6D

6D planar magnetic levitation system - PIMag 6D

The paper describes the structure of a novel 6 DOF planar magnetic drive system with nanometer accuracy. Some details of the model based design are described and some performance and qualification results are given. A main advantage of the system is that it uses only six, i.e. the minimum number of...

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Autores principales: Christoph SCHAEFFEL, Michael KATZSCHMANN, Hans-Ulrich MOHR, Rainer GLOESS, Christian RUDOLF, Christopher MOCK, Carolin WALENDA
Formato: article
Lenguaje:EN
Publicado: The Japan Society of Mechanical Engineers 2015
Materias:
6 dof nano positioning
magnetic levitation
planar magnetic bearing system
halbach array
thermal management
feed forward based on correction matrices
trajectory control
Mechanical engineering and machinery
TJ1-1570
Acceso en línea:https://doaj.org/article/825b5dffd65c43ae88ddd358c7c600ac
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https://doaj.org/article/825b5dffd65c43ae88ddd358c7c600ac

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