6D planar magnetic levitation system - PIMag 6D

The paper describes the structure of a novel 6 DOF planar magnetic drive system with nanometer accuracy. Some details of the model based design are described and some performance and qualification results are given. A main advantage of the system is that it uses only six, i.e. the minimum number of...

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Autores principales:	Christoph SCHAEFFEL, Michael KATZSCHMANN, Hans-Ulrich MOHR, Rainer GLOESS, Christian RUDOLF, Christopher MOCK, Carolin WALENDA
Formato:	article
Lenguaje:	EN
Publicado:	The Japan Society of Mechanical Engineers 2015
Materias:	6 dof nano positioning magnetic levitation planar magnetic bearing system halbach array thermal management feed forward based on correction matrices trajectory control Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/825b5dffd65c43ae88ddd358c7c600ac
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id	oai:doaj.org-article:825b5dffd65c43ae88ddd358c7c600ac
record_format	dspace
spelling	oai:doaj.org-article:825b5dffd65c43ae88ddd358c7c600ac2021-11-26T06:35:12Z6D planar magnetic levitation system - PIMag 6D2187-974510.1299/mej.15-00111https://doaj.org/article/825b5dffd65c43ae88ddd358c7c600ac2015-10-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/mej/3/1/3_15-00111/_pdf/-char/enhttps://doaj.org/toc/2187-9745The paper describes the structure of a novel 6 DOF planar magnetic drive system with nanometer accuracy. Some details of the model based design are described and some performance and qualification results are given. A main advantage of the system is that it uses only six, i.e. the minimum number of sensors and coils to control all six degrees of freedom what keeps the system simple and makes it very effective. Furthermore the measurement system and the actuators are completely located below the slider; hence the platform is freely accessible from above and does not need any wiring connection since only passive parts as permanent magnets and grid plates are placed in the moved part of the platform.Christoph SCHAEFFELMichael KATZSCHMANNHans-Ulrich MOHRRainer GLOESSChristian RUDOLFChristopher MOCKCarolin WALENDAThe Japan Society of Mechanical Engineersarticle6 dof nano positioningmagnetic levitationplanar magnetic bearing systemhalbach arraythermal managementfeed forward based on correction matricestrajectory controlMechanical engineering and machineryTJ1-1570ENMechanical Engineering Journal, Vol 3, Iss 1, Pp 15-00111-15-00111 (2015)
institution	DOAJ
collection	DOAJ
language	EN
topic	6 dof nano positioning magnetic levitation planar magnetic bearing system halbach array thermal management feed forward based on correction matrices trajectory control Mechanical engineering and machinery TJ1-1570
spellingShingle	6 dof nano positioning magnetic levitation planar magnetic bearing system halbach array thermal management feed forward based on correction matrices trajectory control Mechanical engineering and machinery TJ1-1570 Christoph SCHAEFFEL Michael KATZSCHMANN Hans-Ulrich MOHR Rainer GLOESS Christian RUDOLF Christopher MOCK Carolin WALENDA 6D planar magnetic levitation system - PIMag 6D
description	The paper describes the structure of a novel 6 DOF planar magnetic drive system with nanometer accuracy. Some details of the model based design are described and some performance and qualification results are given. A main advantage of the system is that it uses only six, i.e. the minimum number of sensors and coils to control all six degrees of freedom what keeps the system simple and makes it very effective. Furthermore the measurement system and the actuators are completely located below the slider; hence the platform is freely accessible from above and does not need any wiring connection since only passive parts as permanent magnets and grid plates are placed in the moved part of the platform.
format	article
author	Christoph SCHAEFFEL Michael KATZSCHMANN Hans-Ulrich MOHR Rainer GLOESS Christian RUDOLF Christopher MOCK Carolin WALENDA
author_facet	Christoph SCHAEFFEL Michael KATZSCHMANN Hans-Ulrich MOHR Rainer GLOESS Christian RUDOLF Christopher MOCK Carolin WALENDA
author_sort	Christoph SCHAEFFEL
title	6D planar magnetic levitation system - PIMag 6D
title_short	6D planar magnetic levitation system - PIMag 6D
title_full	6D planar magnetic levitation system - PIMag 6D
title_fullStr	6D planar magnetic levitation system - PIMag 6D
title_full_unstemmed	6D planar magnetic levitation system - PIMag 6D
title_sort	6d planar magnetic levitation system - pimag 6d
publisher	The Japan Society of Mechanical Engineers
publishDate	2015
url	https://doaj.org/article/825b5dffd65c43ae88ddd358c7c600ac
work_keys_str_mv	AT christophschaeffel 6dplanarmagneticlevitationsystempimag6d AT michaelkatzschmann 6dplanarmagneticlevitationsystempimag6d AT hansulrichmohr 6dplanarmagneticlevitationsystempimag6d AT rainergloess 6dplanarmagneticlevitationsystempimag6d AT christianrudolf 6dplanarmagneticlevitationsystempimag6d AT christophermock 6dplanarmagneticlevitationsystempimag6d AT carolinwalenda 6dplanarmagneticlevitationsystempimag6d
_version_	1718409788092579840

6D planar magnetic levitation system - PIMag 6D

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