6D planar magnetic levitation system - PIMag 6D
The paper describes the structure of a novel 6 DOF planar magnetic drive system with nanometer accuracy. Some details of the model based design are described and some performance and qualification results are given. A main advantage of the system is that it uses only six, i.e. the minimum number of...
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| Autores principales: | , , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
The Japan Society of Mechanical Engineers
2015
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/825b5dffd65c43ae88ddd358c7c600ac |
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