Fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device
For high sensitivity in micro bio-analysis devices (MBD), the fabrication of the micro-structured reaction field using vertically aligned carbon nanotubes (VACNTs) which is pillar-structured by two methods was performed. The first method is the combination of photolithography and thermal chemical va...
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Auteurs principaux: | , , , , |
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Format: | article |
Langue: | EN |
Publié: |
The Japan Society of Mechanical Engineers
2016
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Accès en ligne: | https://doaj.org/article/8332879ee7ee4ebe82148c8984792eda |
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