Fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device

For high sensitivity in micro bio-analysis devices (MBD), the fabrication of the micro-structured reaction field using vertically aligned carbon nanotubes (VACNTs) which is pillar-structured by two methods was performed. The first method is the combination of photolithography and thermal chemical va...

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Autores principales:	Yuma SUZUKI, Ewelina PABJAŃCZYK-WLAZŁO, Jungo ONODA, Tetsuhide SHIMIZU, Ming YANG
Formato:	article
Lenguaje:	EN
Publicado:	The Japan Society of Mechanical Engineers 2016
Materias:	micro bio-analysis device carbon nanotubes photolithography molding process transfer press Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/8332879ee7ee4ebe82148c8984792eda
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spelling	oai:doaj.org-article:8332879ee7ee4ebe82148c8984792eda2021-11-26T06:40:17ZFabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device2187-974510.1299/mej.15-00567https://doaj.org/article/8332879ee7ee4ebe82148c8984792eda2016-04-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/mej/3/2/3_15-00567/_pdf/-char/enhttps://doaj.org/toc/2187-9745For high sensitivity in micro bio-analysis devices (MBD), the fabrication of the micro-structured reaction field using vertically aligned carbon nanotubes (VACNTs) which is pillar-structured by two methods was performed. The first method is the combination of photolithography and thermal chemical vapor deposition (CVD). The second method is the molding process of polydimethylsiloxane (PDMS) substrate with micro-pillars array and the transfer press of VACNTs synthesized by thermal CVD on PDMS substrate for lower cost in mass production compared with photolithography process. In the first method, circular-pattered metal film on silicon (Si) substrate as the catalyst for VACNTs synthesis was fabricated by photolithography and VACNTs-pillars array was successfully fabricated using the substrate with circular-pattered metal film by thermal CVD. Furthermore, the protein adsorption property of these structures was evaluated as the reaction field of MBD by ultraviolet (UV) spectroscopy. The results show that the protein adsorption property was improved considering the design of micro pattern in VACNTs structures. On the other hand, in the second method, pillar-structured PDMS substrate was molded using a photoresist mold by photolithography and VACNTs was transferred on PDMS substrate by transfer-press equipment. The results indicate that VACNTs can be transferred on the top of micro pillar of PDMS substrate controlling the load of transfer press. Furthermore, it is indicated that micro-pillar VACNTs structures can be fabricated by molding and transfer press with lower cost than the combination of photolithography and thermal CVD.Yuma SUZUKIEwelina PABJAŃCZYK-WLAZŁOJungo ONODATetsuhide SHIMIZUMing YANGThe Japan Society of Mechanical Engineersarticlemicro bio-analysis devicecarbon nanotubesphotolithographymolding processtransfer pressMechanical engineering and machineryTJ1-1570ENMechanical Engineering Journal, Vol 3, Iss 2, Pp 15-00567-15-00567 (2016)
institution	DOAJ
collection	DOAJ
language	EN
topic	micro bio-analysis device carbon nanotubes photolithography molding process transfer press Mechanical engineering and machinery TJ1-1570
spellingShingle	micro bio-analysis device carbon nanotubes photolithography molding process transfer press Mechanical engineering and machinery TJ1-1570 Yuma SUZUKI Ewelina PABJAŃCZYK-WLAZŁO Jungo ONODA Tetsuhide SHIMIZU Ming YANG Fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device
description	For high sensitivity in micro bio-analysis devices (MBD), the fabrication of the micro-structured reaction field using vertically aligned carbon nanotubes (VACNTs) which is pillar-structured by two methods was performed. The first method is the combination of photolithography and thermal chemical vapor deposition (CVD). The second method is the molding process of polydimethylsiloxane (PDMS) substrate with micro-pillars array and the transfer press of VACNTs synthesized by thermal CVD on PDMS substrate for lower cost in mass production compared with photolithography process. In the first method, circular-pattered metal film on silicon (Si) substrate as the catalyst for VACNTs synthesis was fabricated by photolithography and VACNTs-pillars array was successfully fabricated using the substrate with circular-pattered metal film by thermal CVD. Furthermore, the protein adsorption property of these structures was evaluated as the reaction field of MBD by ultraviolet (UV) spectroscopy. The results show that the protein adsorption property was improved considering the design of micro pattern in VACNTs structures. On the other hand, in the second method, pillar-structured PDMS substrate was molded using a photoresist mold by photolithography and VACNTs was transferred on PDMS substrate by transfer-press equipment. The results indicate that VACNTs can be transferred on the top of micro pillar of PDMS substrate controlling the load of transfer press. Furthermore, it is indicated that micro-pillar VACNTs structures can be fabricated by molding and transfer press with lower cost than the combination of photolithography and thermal CVD.
format	article
author	Yuma SUZUKI Ewelina PABJAŃCZYK-WLAZŁO Jungo ONODA Tetsuhide SHIMIZU Ming YANG
author_facet	Yuma SUZUKI Ewelina PABJAŃCZYK-WLAZŁO Jungo ONODA Tetsuhide SHIMIZU Ming YANG
author_sort	Yuma SUZUKI
title	Fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device
title_short	Fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device
title_full	Fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device
title_fullStr	Fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device
title_full_unstemmed	Fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device
title_sort	fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device
publisher	The Japan Society of Mechanical Engineers
publishDate	2016
url	https://doaj.org/article/8332879ee7ee4ebe82148c8984792eda
work_keys_str_mv	AT yumasuzuki fabricationandevaluationofmicrostructuredreactionfieldwithverticallyalignedcarbonnanotubesformicrobioanalysisdevice AT ewelinapabjanczykwlazło fabricationandevaluationofmicrostructuredreactionfieldwithverticallyalignedcarbonnanotubesformicrobioanalysisdevice AT jungoonoda fabricationandevaluationofmicrostructuredreactionfieldwithverticallyalignedcarbonnanotubesformicrobioanalysisdevice AT tetsuhideshimizu fabricationandevaluationofmicrostructuredreactionfieldwithverticallyalignedcarbonnanotubesformicrobioanalysisdevice AT mingyang fabricationandevaluationofmicrostructuredreactionfieldwithverticallyalignedcarbonnanotubesformicrobioanalysisdevice
_version_	1718409729314652160

Fabrication and evaluation of micro-structured reaction field with vertically aligned carbon nanotubes for micro bio-analysis device

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